Produktdetails:
Zahlung und Versand AGB:
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Pumpende Geschwindigkeit: | 1401L/s | Schmierung: | Maglev |
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Flansch: | ISO-F/CF 200 | Abkühlen: | Wasser |
Name: | Null Achse Turbomolecular-Pumpen-Antikorrosion der Reibungs-5 | Schlüsselwort: | Turbomolecular-Pumpe |
Markieren: | turbomolecular Pumpe der nullreibung,turbomolecular Pumpe mit 5 Achsen,Antikorrosion der turbomolecular Pumpe |
Water Cooling Maglev Lubrication Turbomolecular Pump CE
Technologies:
Specifications:
Model | CXF-200/1401 |
Pump Speed(l/s,Air) | 1400 |
Compression Ratio | >1×107 |
Ultimate Vacuum(Pa) | ≤2×10-6 |
Inlet Flange | DN200 ISO K(LF) |
DN200 ISO F | |
DN200 ISO CF | |
Outlet Flange | KF 40 |
Rotation Speed(rpm) | 33000 |
Run-up Time(min) | 6 |
VIB (mm) | <0.05 |
Backing Pump (L/s) | 15 |
Mounting or ientation | Any |
Cooling method | Water |
Weight(kg)(With Controller) | 51 |
Applications:
Series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature.
Ansprechpartner: sales
Telefon: +8613810212935